|Gallery Group 1|
|Group 1 | Group 2 | Group 3
Parylene-polymer-based microfluidic calorimeter chip mounted on a vacuum chuck.
Parylene-polymer-based microfluidic calorimeter chip - thermopile and heater on parylene membrane.
Microfluidics encapsulated BioNEMS chips, front and back, with penny for scale.
BioNEMS microfluidic interconnects with food dye.
A mechanically-coupled very-high frequency (VHF) NEMS resonator.
SEM image of a first generation sample for measuring the dispersive interaction between a CPB qubit and NEMS resonator. Lithography by Pierre Echternach. The NEMS is a doubly-clamped SiN resonator with aluminum metallization. The fundamental in-plane mode couples most strongly to the CPB and has a frequency of ~60 MHz.
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