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Parylene-polymer-based microfluidic calorimeter chip mounted on a vacuum chuck.

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Parylene-polymer-based microfluidic calorimeter chip - thermopile and heater on parylene membrane.

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Microfluidics encapsulated BioNEMS chips, front and back, with penny for scale.

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BioNEMS microfluidic interconnects with food dye.

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A mechanically-coupled very-high frequency (VHF) NEMS resonator.

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SEM image of a first generation sample for measuring the dispersive interaction between a CPB qubit and NEMS resonator. Lithography by Pierre Echternach. The NEMS is a doubly-clamped SiN resonator with aluminum metallization. The fundamental in-plane mode couples most strongly to the CPB and has a frequency of ~60 MHz.

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