Scanning electron micrograph of a dense array of NEMS resonator gas sensors. Each resonator is approximately 2.5 micrometers in length, and the packing density is 10⁶ resonators per cm².

Nanochamber used for ultrafast gas sensing with NEMS resonators. The chamber, composed of a microfluidic channel, is only 15 nanoliters in volume, minimizing dead volume broadening of injected gas pulses.

Microfluidics encapsulated force sensors for SCPFM.

SEM image of two SCPFM force sensors.

Colorized SEM image of a mold used to fabricate microfluidics.

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