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Scanning electron micrograph of a dense array of NEMS resonator gas sensors. Each resonator is approximately 2.5 micrometers in length, and the packing density is 106 resonators per cm2.

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Nanochamber used for ultrafast gas sensing with NEMS resonators. The chamber, composed of a microfluidic channel, is only 15 nanoliters in volume, minimizing dead volume broadening of injected gas pulses.

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Microfluidics encapsulated force sensors for SCPFM.

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SEM image of two SCPFM force sensors.

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Colorized SEM image of a mold used to fabricate microfluidics.

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