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A ultra-high frequency (UHF) high-Q free-free beam NEMS resonator.

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SEM image of UHF NEMS resonator.

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Colorized SEM image of UHF NEMS resonator.

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SEM image of ultra high frequency NEMS resonator made of silicon carbide with aluminum on top for electrical contact.

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Scanning electron micrograph of a nanocantilever resonator gas sensor. The cantilever is composed of a 100-nm silicon nitride membrane, plus a 30-nm metallic gold film for integrated thermoelastic actuation and piezoresistive detection.

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