A ultra-high frequency (UHF) high-Q free-free beam NEMS resonator.

SEM image of UHF NEMS resonator.

Colorized SEM image of UHF NEMS resonator.

SEM image of ultra high frequency NEMS resonator made of silicon carbide with aluminum on top for electrical contact.

Scanning electron micrograph of a nanocantilever resonator gas sensor. The cantilever is composed of a 100-nm silicon nitride membrane, plus a 30-nm metallic gold film for integrated thermoelastic actuation and piezoresistive detection.

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